Overview

This equipment is designed for installation in a Class 1000 (ISO Class 6 equivalent) clean laboratory environment and is capable of achieving Class 10 cleanliness inside the cabinet. It effectively filters common elemental contaminants such as B, Si, K, and Ca.

Application Scope:
For trace element analysis laboratories (dedicated to ICP-MS, Inductively Coupled Plasma Mass Spectrometry).

Layout Requirement:
A maintenance access space of approximately 500–600 mm should be reserved at the rear side of the equipment.

Equipment Configuration

1. Class 100 Chemical Ultra-Clean Cabinet
   1500 × 1000 × 2350 mm
   Class 100
   Quantity: 1 unit
   Exhaust air volume: 1800 m³/h

2. Class 100 Ultra-Clean Sampling Workstation
   900 × 1000 × 2350 mm
   Class 100
   Quantity: 1 unit
   Exhaust air volume: 1000 m³/h

I. Class 100 Chemical Ultra-Clean Cabinet

1. Dimensions: 1500 × 1000 × 2300 mm (±5 mm).

2. The cabinet shall comply with GB 50073 Air Cleanliness Class 5 (Class 5) negative pressure (-5 Pa). The entire cabinet shall be made of PP (polypropylene), resistant to strong acids and alkalis. The interior must be equipped with a single-outlet PVDF faucet, PP sink, and optional gas cock.

3. Must meet GB 50073 Air Cleanliness Class 4 requirements. Leakage testing shall be performed prior to delivery. The filter shall be an American AAF U15 grade PTFE filter or equivalent. The measured particle count of 0.3–0.5 μm particles shall not exceed 1 particle/m³.

4. Equipped with a unique air curtain system to prevent interference between internal and external airflow. A secondary air distribution plate ensures uniform cleanliness throughout the cabinet.

5. Interior wall connection method must ensure no metal components. The entire structure shall be PP material with PEEK screws.

6. Movable viewing window: 6 mm thick Nan Ya PVC viewing panel with laboratory warning signage.

7. Window mechanical system: Made of high-quality corrosion-resistant materials, ensuring the window can remain at any position.

8. Independent LED lighting system, fully sealed and not in contact with internal cabinet gases.

9. External power control switch for emergency power cut-off.

10. Independent adjustable air supply with valve opening display; cabinet pressure display for real-time monitoring.

11. The high-efficiency filter must consider boron contamination background and shall be boron-free. Metal ion leaching must be less than 0.01 ppb.

12. The cabinet shall include a built-in supply fan. Air supply is drawn from the room to ensure that cabinet operation does not disturb room airflow patterns. Exhaust air shall be connected to a ceiling exhaust duct (φ250 mm).

13. The exhaust system shall be a variable air volume (VAV) system, automatically adjusting exhaust airflow according to internal pressure changes to ensure stable operation. An emergency exhaust function must be included for one-touch maximum exhaust to ensure operator safety.

14. Equipped with:

• Daikin 231 PFA nitrogen gun (external high-purity nitrogen supply at 0.8 MPa)

• Coiled gas hose ≥ 1.5 m

• PP/PVDF/PTFE sink (optional)

• Single-outlet PVDF faucet

• Drainage function

• Fuma casters

• Leakage containment tray

• Liquid leakage alarm device

• Three-color status indicator light

II. Class 100 Ultra-Clean Sampling Workstation

1. Dimensions: 900 (W) × 1000 × 2300 mm (±5 mm).

2. The workstation shall comply with GB 50073 Air Cleanliness Class 5 (Class 5) negative pressure (-5 Pa). Entire structure made of PP material, resistant to strong acids and alkalis.

3. Must meet GB 50073 Air Cleanliness Class 4 requirements. Leakage testing required before delivery. Equipped with American AAF U15 grade PTFE filter or equivalent. The measured particle count of 0.3–0.5 μm particles shall not exceed 1 particle/m³.

4. Equipped with a unique air curtain system and secondary air distribution plate to ensure uniform cleanliness.

5. Interior structure must contain no metal components. Entire body made of PP material with PEEK screws.

6. Movable viewing window: 6 mm thick Nan Ya PVC panel with laboratory warning signage.

7. Window mechanical system: High-quality corrosion-resistant material allowing adjustable positioning.

8. Independent sealed LED lighting system not in contact with cabinet gases.

9. External emergency power control switch.

10. Independent adjustable air supply with valve opening display; internal pressure display for monitoring.

11. Boron-free high-efficiency filter; metal ion leaching less than 0.01 ppb.

12. Built-in supply fan drawing air from the room; operation must not disturb room airflow pattern. Exhaust connected to ceiling duct (φ250 mm).

13. Variable air volume exhaust system with automatic pressure-based airflow adjustment and emergency maximum exhaust function.

14. Equipped with Fuma casters, leakage containment tray, liquid leakage alarm, and three-color indicator light.

Comprehensive Requirements

1. High-efficiency filters must be PTFE material with plastic separators. Detection reports for high-efficiency filters (including those used in the chemical ultra-clean cabinet and sampling workstation) must be provided. Before project acceptance, a valid third-party testing report bearing “CMA” or “CNAS” certification marks must be submitted as one of the acceptance criteria.

2. Both the chemical ultra-clean cabinet and the sampling workstation must achieve GB 50073 Air Cleanliness Class 4 requirements using U15 grade PTFE filters. Independent acceptance inspection shall be conducted after delivery.

3. A pure water pipeline channel shall be pre-installed inside the Class 100 chemical ultra-clean cabinet in the pre-treatment area. After installation of the pure water system, PFA tubing shall be used to introduce pure water into the cabinet, with appropriate valves installed. Valve material must be PFA, PVDF, or PTFE.

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Xinruiwei Semiconductor Technology (Suzhou) Co., Ltd.